Browsing by author "Vogt, Tatjana"
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Characterization of 248nm deep ultraviolet (DUV) photoresist after ion implantation
Tsvetanova, Diana; Vos, Rita; Vereecke, Guy; Clemente, Francesca; Vanstreels, Kris; Conard, Thierry; Vogt, Tatjana; Mertens, Paul; Heyns, Marc (2009)