Browsing by author "Goldberg, Kenneth"
Now showing items 1-2 of 2
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A method of image-based aberration metrology for EUVL tools
Levinson, Zac; Raghunathan, Sudhar; Verduijn, Erik; Wood, Obert; Mangat, Pawitter; Goldberg, Kenneth; Benk, Markus; Wojdyla, Antoine; Philipsen, Vicky; Hendrickx, Eric; Smith, Bruce (2015) -
Experimental verification of high-NA imaging simulations using SHARP
Davydova, Natalia; Liu, Fei; Benk, Markus; van Setten, Eelco; Bottiglieri, Gerardo; van Oosten, Anton; McNamara, John; Wiaux, Vincent; Franke, Joern-Holger; Goldberg, Kenneth; Nam, D. S.; Zekry, Joseph; Naulleau, Patrick; Fliervoet, Timon; Carpaij, Rene (2020)