Publication:

A method of image-based aberration metrology for EUVL tools

Date

2015

Proceedings Paper

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Author(s)

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Raghunathan, Sudhar

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;

Mangat, Pawitter

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Goldberg, Kenneth

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Wojdyla, Antoine

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Philipsen, Vicky

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Hendrickx, Eric

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1905 since deposited on 2021-10-22

Acq. date: 2026-03-18