Browsing by author "Vaida, Selim"

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Improved plasma resistance for porous low-k dielectrics by pore stuffing approach

Zhang, Liping; de Marneffe, Jean-Francois; Heyne, Markus; Naumov, Sergej; Sun, Yiting; Zotovich, Alexey; El Otell, Ziad; Vaida, Selim; De Gendt, Stefan; Baklanov, Mikhaïl (2015)