Publication:

Improved plasma resistance for porous low-k dielectrics by pore stuffing approach

Date

2015
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

30332.pdf 2.15 MB

Author(s)

Zhang, Liping  
;
de Marneffe, Jean-Francois  
;
Heyne, Markus
;
Naumov, Sergej
;
Sun, Yiting  
;
Zotovich, Alexey
;
El Otell, Ziad  
;
Vaida, Selim
;
De Gendt, Stefan  
;
Baklanov, Mikhaïl

Journal

ECS Journal of Solid State Science and Technology

Abstract

Description

Statistics

Views

1924 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-02-25

Citations

Statistics

Views

1924 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-02-25

Citations