Publication:

Improved plasma resistance for porous low-k dielectrics by pore stuffing approach

Date

2015

Journal article

Simple item page Full metadata Statistics

Files

30332.pdf 2.15 MB

Author(s)

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de Marneffe, Jean-Francois

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Zotovich, Alexey

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De Gendt, Stefan

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Baklanov, Mikhaïl

Journal

ECS Journal of Solid State Science and Technology

Statistics

1925 since deposited on 2021-10-23

Acq. date: 2026-04-26