Improved plasma resistance for porous low-k dielectrics by pore stuffing approach

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Authors

Zhang, Liping; de Marneffe, Jean-Francois; Heyne, Markus; Naumov, Sergej; Sun, Yiting; Zotovich, Alexey; El Otell, Ziad; Vaida, Selim; De Gendt, Stefan; Baklanov, Mikhaïl

ISSN

2162-8769

Issue

1

Journal

ECS Journal of Solid State Science and Technology

Volume

4

Title

Improved plasma resistance for porous low-k dielectrics by pore stuffing approach

Publication type

Journal article

Embargo date

9999-12-31

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