Publication:

Improved plasma resistance for porous low-k dielectrics by pore stuffing approach

Date

2015

Journal article

Simple item page Full metadata Statistics

Files

30332.pdf 2.15 MB

Author(s)

;

de Marneffe, Jean-Francois

;

;

;

;

Zotovich, Alexey

;

;

;

De Gendt, Stefan

;

Baklanov, Mikhaïl

Journal

ECS Journal of Solid State Science and Technology

Metrics

1922 since deposited on 2021-10-23

3last month

Acq. date: 2026-01-07