Browsing by author "Lammers, Jeroen"

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Investigation of statistical Fluctuations on line edge rougness

Leunissen, Peter; Patsis, G.P.; Van Steenwinckel, David; Lammers, Jeroen (2005)
Lithographic importance of acid diffusion in chemically amplified resists

Van Steenwinckel, David; Lammers, Jeroen; Leunissen, Peter; Kwinten, Hans (2005)