Browsing by author "Chen, Shaoyin"

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    • Laser anneal of oxycarbosilane low-k film 

      Redzheb, Murad; Armini, Silvia; Vanstreels, Kris; Meersschaut, Johan; Baklanov, Mikhail; Wang, Yun; Chen, Shaoyin; Le, Van; Awdshiew, Michael; Van der Voort, Pascal (2016)