Publication:

Laser anneal of oxycarbosilane low-k film

Date

2016

Proceedings Paper

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Files

33765.pdf 504.56 KB

Author(s)

;

;

Vanstreels, Kris

;

Meersschaut, Johan

;

Baklanov, Mikhail

;

;

;

;

Awdshiew, Michael

;

Van der Voort, Pascal

Statistics

1955 since deposited on 2021-10-23

Acq. date: 2026-02-28