Publication:
Laser anneal of oxycarbosilane low-k film
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-4420-0966 | |
| cris.virtual.orcid | 0000-0003-2467-1784 | |
| cris.virtual.orcid | 0000-0003-0578-3422 | |
| cris.virtualsource.department | 5d18d34b-14b0-47d6-9d57-01cf8f1a8a92 | |
| cris.virtualsource.department | 9688c6c3-6d95-4d12-b7a3-176d84ad0eef | |
| cris.virtualsource.department | 543f9950-e045-4e77-8292-8ca26808ebf3 | |
| cris.virtualsource.orcid | 5d18d34b-14b0-47d6-9d57-01cf8f1a8a92 | |
| cris.virtualsource.orcid | 9688c6c3-6d95-4d12-b7a3-176d84ad0eef | |
| cris.virtualsource.orcid | 543f9950-e045-4e77-8292-8ca26808ebf3 | |
| dc.contributor.author | Redzheb, Murad | |
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Meersschaut, Johan | |
| dc.contributor.author | Baklanov, Mikhail | |
| dc.contributor.author | Wang, Yun | |
| dc.contributor.author | Chen, Shaoyin | |
| dc.contributor.author | Le, Van | |
| dc.contributor.author | Awdshiew, Michael | |
| dc.contributor.author | Van der Voort, Pascal | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | Meersschaut, Johan | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
| dc.date.accessioned | 2021-10-23T14:06:51Z | |
| dc.date.available | 2021-10-23T14:06:51Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27201 | |
| dc.identifier.url | http://ieeexplore.ieee.org/document/7507716/ | |
| dc.source.beginpage | 156 | |
| dc.source.conference | International Interconnect Technology Conference/ Advanced Metallization Conference | |
| dc.source.conferencedate | 23/05/2016 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.source.endpage | 158 | |
| dc.title | Laser anneal of oxycarbosilane low-k film | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |