Browsing by author "Matsutani, Mihoko"

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Effect of bake/cure temperature of an advanced organic ultra low-k material on the interface adhesion strength to metal barriers

Vanstreels, Kris; Pantouvaki, Marianna; Ferchichi, Abdelkarim; Verdonck, Patrick; Conard, Thierry; Ono, Yukiharu; Matsutani, Mihoko; Nakatani, Koji; Baklanov, Mikhaïl (2011)