Authors

Vanstreels, Kris; Pantouvaki, Marianna; Ferchichi, Abdelkarim; Verdonck, Patrick; Conard, Thierry; Ono, Yukiharu; Matsutani, Mihoko; Nakatani, Koji; Baklanov, Mikhaïl

ISSN

0021-8979

Issue

7

Journal

Journal of Applied Physics

Volume

109

Title

Effect of bake/cure temperature of an advanced organic ultra low-k material on the interface adhesion strength to metal barriers

Publication type

Journal article