Browsing by author "Wouters, K."
Now showing items 1-3 of 3
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A Parylene temporary packaging technique for MEMS wafer handling
Wen, L.; Wouters, K.; Ceyssens, F.; Witvrouw, Ann; Puers, Bob (2011) -
A parylene temporary packaging technique for MEMS wafer handling
Wen, Liangong; Wouters, K.; Ceyssens, F.; Witvrouw, Ann; Puers, Bob (2011) -
A parylene temporary packaging technique for MEMS wafer handling
Wen, Lianggong; Wouters, K.; Ceyssens, F.; Witvrouw, Ann; Puers, Bob (2012)