A parylene temporary packaging technique for MEMS wafer handling

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Authors
Wen, Lianggong; Wouters, K.; Ceyssens, F.; Witvrouw, Ann; Puers, Bob
ISSN
0924-4247
Journal
Sensors and Actuators A: Physical
Volume
186
Title
A parylene temporary packaging technique for MEMS wafer handling
Publication type
Journal article
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