Browsing by author "Fuchimoto, Daisuke"
Now showing items 1-3 of 3
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Contour-based metrology for complex 2D shaped patterns printed by multiple-patterning process
Fuchimoto, Daisuke; Ishimoto, Toru; Hiroyuki, Shindo; Sugahara, Hitoshi; Toyoda, Yasutaka; Mailfert, Julien; De Bisschop, Peter (2014) -
Implementation of templated DSA for via layer patterning at the 7 nm node
Gronheid, Roel; Doise, Jan; Bekaert, Joost; Chan, BT; Karageorgos, Ioannis; Ryckaert, Julien; Vandenberghe, Geert; Cao, Yi; Lin, G.; Somervell, Mark; Fenger, Germain; Fuchimoto, Daisuke (2015) -
Measurement technology to quantify 2D pattern shape in sub-2xnm advanced lithography
Fuchimoto, Daisuke; Sakai, H.; Shindo, H.; Izawa, M.; Sugahara, H.; Van de Kerkhove, Jeroen; De Bisschop, Peter (2013)