Browsing by author "Ranson, P."

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Applications of cryogenic plasma etching for microtechnology and advanced CMOS manufacturing

Dussart, R.; Lefaucheux, P.; Tillocher, T.; Ranson, P.; Boufnichel, M.; Ljazouli, R.; Zhang, Liping; Mankelevich, Y.; de Marneffe, Jean-Francois; De Gendt, Stefan; Baklanov, Mikhaïl (2013)