Publication:

Applications of cryogenic plasma etching for microtechnology and advanced CMOS manufacturing

Date

2013

Meeting abstract

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Files

26825.pdf 386.17 KB

Author(s)

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Mankelevich, Y.

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de Marneffe, Jean-Francois

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De Gendt, Stefan

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Baklanov, Mikhaïl

Statistics

2049 since deposited on 2021-10-21

Acq. date: 2026-06-09