Publication:

Applications of cryogenic plasma etching for microtechnology and advanced CMOS manufacturing

Date

2013

Meeting abstract

Simple item page Full metadata Statistics

Files

26825.pdf 386.17 KB

Author(s)

;

;

;

;

;

;

;

Mankelevich, Y.

;

de Marneffe, Jean-Francois

;

De Gendt, Stefan

;

Baklanov, Mikhaïl

Statistics

2043 since deposited on 2021-10-21

Acq. date: 2026-02-24