Browsing by author "Mankelevich, Y"

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Dependence of electric potential at trench surfaces on ion angula distribution in plasma etching processes

Palov, A; Mankelevich, Y; Rakhimova, T; Baklanov, Mikhaïl (2016)
Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature

Lopaev, D; Rakhimova, T; Mankelevich, Y; Kurchikov, K.; Zyryanov, S.; Zotovich, A.; Baklanov, Mikhaïl (2015)