Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature

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Authors
Lopaev, D; Rakhimova, T; Mankelevich, Y; Kurchikov, K.; Zyryanov, S.; Zotovich, A.; Baklanov, Mikhaïl
Conference
Plasma Etch and Strip in Microtechnology - PESM
Title
Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature
Publication type
Meeting abstract
Embargo date
9999-12-31
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