Browsing by author "Cavalaglio, Sebastien"
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Dry-Etching Processes for High-Aspect-Ratio Features with Sub-10 nm Resolution High-chi Block Copolymers
Pound-Lana, Gwenaelle; Bezard, Philippe; Petit-Etienne, Camille; Cavalaglio, Sebastien; Cunge, Gilles; Cabannes-Boue, Benjamin; Fleury, Guillaume; Chevalier, Xavier; Zelsmann, Marc (2021)