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Dry-Etching Processes for High-Aspect-Ratio Features with Sub-10 nm Resolution High-chi Block Copolymers
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Authors
Pound-Lana, Gwenaelle
;
Bezard, Philippe
;
Petit-Etienne, Camille
;
Cavalaglio, Sebastien
;
Cunge, Gilles
;
Cabannes-Boue, Benjamin
;
Fleury, Guillaume
;
Chevalier, Xavier
;
Zelsmann, Marc
DOI
10.1021/acsami.1c13503
ISSN
1944-8244
PMID
MEDLINE:34636239
Issue
41
Journal
ACS APPLIED MATERIALS & INTERFACES
Volume
13
Title
Dry-Etching Processes for High-Aspect-Ratio Features with Sub-10 nm Resolution High-chi Block Copolymers
Publication type
Journal article
Embargo date
2021-10-12
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2
20.500.12860/41957.2
*
2023-08-09T08:38:34Z
validation by library/open access desk
1
20.500.12860/41957
2023-06-20T10:36:42Z
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