Browsing by author "Hsu, S."
Now showing items 1-3 of 3
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Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Baron, S.; Tsai, M.-C.; Ning, K.; Hsu, S.; Liu, H.Y.; Mulder, M.; Bouma, A.; van der Heijden, E.; Mouraille, O.; Schreel, K.; Finders, Jo; Dusa, Mircea; Zimmerman, J.; Graeupner, Paul; Neumann, J.T.; Hennerkes, C. (2010) -
Gray bar masking: fabrication and imaging for 193 nm
Smith, Bruce; Vandenberghe, Geert; Martin, P. W.; Rack, P.; Hsu, S.; Chen, F. (2001) -
The magnitude of potential exposure-tool-induced critical dimension and overlay errors in double dipole lithography for the 65-nm and 45-nm technology nodes
Chiou, T.B.; Chen, A.C.; Tseng, S.E.; Eurlings, M.; Hendrickx, Eric; Hsu, S. (2004)