Publication:

Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells

Date

2010

Proceedings Paper

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Files

18972.pdf 1.42 MB

Author(s)

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Verhaegen, Staf

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Van Look, Lieve

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Trivkovic, Darko

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Lazzarino, Frederic

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Vandenberghe, Geert

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Van Adrichem, Paul

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van der Heijden, E.

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Dusa, Mircea

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Graeupner, Paul

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Metrics

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Acq. date: 2026-01-11