Publication:

Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells

Date

2010
Proceedings Paper
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Author(s)

Bekaert, Joost  
;
Laenens, Bart
;
Verhaegen, Staf
;
Van Look, Lieve  
;
Trivkovic, Darko  
;
Lazzarino, Frederic  
;
Vandenberghe, Geert  
;
Van Adrichem, Paul  
;
Socha, Robert
;
Baron, S.
;
Tsai, M.-C.
;
Ning, K.
;
Hsu, S.
;
Liu, H.Y.
;
Mulder, M.
;
Bouma, A.
;
van der Heijden, E.
;
Mouraille, O.
;
Schreel, K.
;
Finders, Jo
;
Dusa, Mircea  
;
Zimmerman, J.
;
Graeupner, Paul
;
Neumann, J.T.
;
Hennerkes, C.

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