Browsing by author "Drygianakis, D."

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Simulation of the combined effects of polymer size, acid diffusion length, and EUV secondary electron blur on resist line-edge roughness

Drygianakis, D.; Nijkerk, M.D.; Patsis, G.P.; Kokkoris, G.; Raptis, I.; Leunissen, Peter; Gogolides, E. (2007)