Authors

Drygianakis, D.; Nijkerk, M.D.; Patsis, G.P.; Kokkoris, G.; Raptis, I.; Leunissen, Peter; Gogolides, E.

Conference

Advances in Resist Materials and Processing Technology XXIV

Title

Simulation of the combined effects of polymer size, acid diffusion length, and EUV secondary electron blur on resist line-edge roughness

Publication type

Proceedings paper