Publication:
Simulation of the combined effects of polymer size, acid diffusion length, and EUV secondary electron blur on resist line-edge roughness
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1877 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2026-01-09
Citations
Metrics
Views
1877 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2026-01-09
Citations