Browsing by author "Chen, A."

Now showing items 1-2 of 2

Development of automatic OPC treatment and layout decomposition for double dipole lithography for low K1-imaging

Chiou, T.-B.; Chen, A.; Hsu, Stephen D.; Eurlings, M.; Hendrickx, Eric (2005)
Experimental verification of a model based decomposition method for double dipole lithography

Eurlings, M.; Hsu, S.D.; Hendrickx, Eric; op 't Root, W.; Laidig, T.L.; Chiou, T.B.; Chen, A.; Chen, F.; Vandenberghe, Geert; Finders, J. (2004)