Browsing by author "Boissière, Olivier"

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Thermally-stable high effective work function TaCN thin films for metal gate electrode applications

Adelmann, Christoph; Meersschaut, Johan; Ragnarsson, Lars-Ake; Conard, Thierry; Franquet, Alexis; Sengoku, Naohisa; Okuno, Yasutoshi; Favia, Paola; Bender, Hugo; Zhao, Chao; OSullivan, barry; Rothschild, Aude; Schram, Tom; Kittl, Jorge; Van Elshocht, Sven; De Gendt, Stefan; Lehnen, Peer; Boissière, Olivier; Lohe, Christoph (2009)