Publication:

Thermally-stable high effective work function TaCN thin films for metal gate electrode applications

Date

2009

Journal article

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Author(s)

Adelmann, Christoph

;

Meersschaut, Johan

;

Ragnarsson, Lars-Ake

;

Conard, Thierry

;

Franquet, Alexis

;

Sengoku, Naohisa

;

Okuno, Yasutoshi

;

;

;

;

OSullivan, barry

;

Rothschild, Aude

;

;

;

Van Elshocht, Sven

;

De Gendt, Stefan

;

;

Boissière, Olivier

;

Lohe, Christoph

Journal

Journal of Applied Physics

Statistics

1953 since deposited on 2021-10-17

Acq. date: 2026-10-05