Publication:

Thermally-stable high effective work function TaCN thin films for metal gate electrode applications

Date

2009
Journal article
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Author(s)

Adelmann, Christoph  
;
Meersschaut, Johan  
;
Ragnarsson, Lars-Ake  
;
Conard, Thierry  
;
Franquet, Alexis  
;
Sengoku, Naohisa
;
Okuno, Yasutoshi
;
Favia, Paola  
;
Bender, Hugo  
;
Zhao, Chao
;
OSullivan, barry
;
Rothschild, Aude
;
Schram, Tom  
;
Kittl, Jorge
;
Van Elshocht, Sven  
;
De Gendt, Stefan  
;
Lehnen, Peer
;
Boissière, Olivier
;
Lohe, Christoph

Journal

Journal of Applied Physics

Abstract

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1941 since deposited on 2021-10-17
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