Browsing by author "Bao, T.I."
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Self aligned CuGeN process for 32/22nm nodes and beyond
Liu, C.S.; Chen, H.C.; Bao, T.I.; Van Olmen, Jan; Croes, Kristof; Van Besien, Els; Pantouvaki, Marianna; Zhao, Chao; Sleeckx, Erik; Beyer, Gerald; Yu, C.H. (2008)