Publication:

Self aligned CuGeN process for 32/22nm nodes and beyond

Date

2008
Proceedings Paper
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Author(s)

Liu, C.S.
;
Chen, H.C.
;
Bao, T.I.
;
Van Olmen, Jan  
;
Croes, Kristof  
;
Van Besien, Els  
;
Pantouvaki, Marianna  
;
Zhao, Chao
;
Sleeckx, Erik  
;
Beyer, Gerald  
;
Yu, C.H.

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