Publication:

Self aligned CuGeN process for 32/22nm nodes and beyond

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorLiu, C.S.
dc.contributor.authorChen, H.C.
dc.contributor.authorBao, T.I.
dc.contributor.authorVan Olmen, Jan
dc.contributor.authorCroes, Kristof
dc.contributor.authorVan Besien, Els
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorZhao, Chao
dc.contributor.authorSleeckx, Erik
dc.contributor.authorBeyer, Gerald
dc.contributor.authorYu, C.H.
dc.contributor.imecauthorVan Olmen, Jan
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.date.accessioned2021-10-17T08:26:41Z
dc.date.available2021-10-17T08:26:41Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14047
dc.source.beginpage199
dc.source.conference11th IEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate1/06/2008
dc.source.conferencelocationSan Fransisco, CA USA
dc.source.endpage201
dc.title

Self aligned CuGeN process for 32/22nm nodes and beyond

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions