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Self aligned CuGeN process for 32/22nm nodes and beyond
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Self aligned CuGeN process for 32/22nm nodes and beyond
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Liu, C.S.
;
Chen, H.C.
;
Bao, T.I.
;
Van Olmen, Jan
;
Croes, Kristof
;
Van Besien, Els
;
Pantouvaki, Marianna
;
Zhao, Chao
;
Sleeckx, Erik
;
Beyer, Gerald
;
Yu, C.H.
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1853
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Acq. date: 2025-12-11
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Metrics
Views
1853
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-11
Citations