Browsing by author "Xue, Ran"
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State-of-the-art of EUV materials for N5 logic and DRAM applications
De Simone, Danilo; Vesters, Yannick; Vanelderen, Pieter; Xue, Ran; Pollentier, Ivan; Vandenberghe, Geert (2018)
Now showing items 1-1 of 1