State-of-the-art of EUV materials for N5 logic and DRAM applications

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Authors
De Simone, Danilo; Vesters, Yannick; Vanelderen, Pieter; Xue, Ran; Pollentier, Ivan; Vandenberghe, Geert
Conference
International Conference on Extreme Ultraviolet Lithography - EUVL
Title
State-of-the-art of EUV materials for N5 logic and DRAM applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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