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State-of-the-art of EUV materials for N5 logic and DRAM applications
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1900 since deposited on 2021-10-25
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Acq. date: 2025-10-28
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1900 since deposited on 2021-10-25
1item.page.metrics.field.last-week
Acq. date: 2025-10-28
Citations