Browsing by author "Bersani, Massimo"

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TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

Barozzi, Mario; Iacob, Erica; van den Berg, Jaap A.; Reading, Michael A.; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Bersani, Massimo (2013)