TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

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Authors

Barozzi, Mario; Iacob, Erica; van den Berg, Jaap A.; Reading, Michael A.; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Bersani, Massimo

ISSN

0142-2421

Issue

1

Journal

Surface and Interface Analysis

Volume

45

Title

TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

Publication type

Journal article

Embargo date

9999-12-31

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