TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

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Author(s)

;

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van den Berg, Jaap A.

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Reading, Michael A.

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Adelmann, Christoph

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Popovici, Mihaela Ioana

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Bersani, Massimo

Journal

Surface and Interface Analysis

Metrics

1901 since deposited on 2021-10-21

1last week

Acq. date: 2025-10-28