Publication:

TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

Date

2013
Journal article
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dc.contributor.authorBarozzi, Mario
dc.contributor.authorIacob, Erica
dc.contributor.authorvan den Berg, Jaap A.
dc.contributor.authorReading, Michael A.
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorTielens, Hilde
dc.contributor.authorBersani, Massimo
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorTielens, Hilde
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2021-10-21T06:44:38Z
dc.date.available2021-10-21T06:44:38Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.issn0142-2421
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22019
dc.source.beginpage394
dc.source.endpage397
dc.source.issue1
dc.source.journalSurface and Interface Analysis
dc.source.volume45
dc.title

TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

dc.typeJournal article
dspace.entity.typePublication
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