Browsing by author "Lin, Chia-Hui"
Now showing items 1-3 of 3
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DUV resist profile improvement on TiN deposited metal layer
Lin, Chia-Hui; Chen, Chun-Ho; Jenq, Jhy-Sayang; Op de Beeck, Maaike; Van den hove, Luc (1996) -
HREM characterization of ion beam synthesized ternary silicides in (111) silicon
Tavares, J.; Bender, Hugo; Wu, Ming Fang; Vantomme, Andre; Langouche, G.; Lin, Chia-Hui (1995) -
Ion beam synthesis of ternary phase CoFe-silicide in (111)Silicon
Tavares, J.; Bender, Hugo; Wu, Ming Fang; Vantomme, Andre; Langouche, G.; Lin, Chia-Hui (1995)