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DUV resist profile improvement on TiN deposited metal layer
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Authors
Lin, Chia-Hui
;
Chen, Chun-Ho
;
Jenq, Jhy-Sayang
;
Op de Beeck, Maaike
;
Van den hove, Luc
Conference
Optical Microlithography IX
Title
DUV resist profile improvement on TiN deposited metal layer
Publication type
Proceedings paper
Embargo date
9999-12-31
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