Browsing by author "Flannery, C. M."
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Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy
Flannery, C. M.; Wittkowski, T.; Jung, K.; Hillebrands, B.; Baklanov, Mikhaïl (2002) -
Nondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopy
Flannery, C. M.; Baklanov, Mikhaïl (2002) -
Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Baklanov, Mikhaïl; Jehoul, Christiane; Flannery, C. M.; Moguilnikov, Konstantin; Gore, R.; Gronbeck, D.; Prokopowicz, G.; Sullivan, C.; You, Y.; Pugliano, N.; Gallagher, M. (2002) -
Thin-film aerogel porosity and stiffness characterised by Surface Acoustic Wave Spectroscopy
Flannery, C. M.; Murray, C.; Baklanov, Mikhaïl; Streiter, I.; Schulz, S. E. (2001)