Publication:
Nondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopy
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1971 since deposited on 2021-10-14
7last month
Acq. date: 2026-08-19
Citations
Statistics
Views
1971 since deposited on 2021-10-14
7last month
Acq. date: 2026-08-19
Citations