Publication:
Nondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopy
Date
| dc.contributor.author | Flannery, C. M. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-14T21:37:28Z | |
| dc.date.available | 2021-10-14T21:37:28Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6323 | |
| dc.source.beginpage | 233 | |
| dc.source.conference | Proceedings of the IEEE International Interconnect Technology Conference | |
| dc.source.conferencedate | 3/06/2002 | |
| dc.source.conferencelocation | Burlingame, CA USA | |
| dc.source.endpage | 235 | |
| dc.title | Nondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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