Publication:
Nondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopy
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1964 since deposited on 2021-10-14
3last month
Acq. date: 2025-12-12
Citations
Metrics
Views
1964 since deposited on 2021-10-14
3last month
Acq. date: 2025-12-12
Citations