Browsing by author "Leroy, Florian"

Now showing items 1-1 of 1

Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

Zhang, Liping; de Marneffe, Jean-Francois; Leroy, Florian; Lefaucheux, Philippe; Tillocher, Thomas; Dussart, Remi; Maekawa, Kaoru; yatsuda, koichi; Dussarrat, Christian; Goodyear, Andy; Cooke, Mike; De Gendt, Stefan; Baklanov, Mikhaïl (2016)