Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

Zhang, Liping; de Marneffe, Jean-Francois; Leroy, Florian; Lefaucheux, Philippe; Tillocher, Thomas; Dussart, Remi; Maekawa, Kaoru; yatsuda, koichi; Dussarrat, Christian; Goodyear, Andy; Cooke, Mike; De Gendt, Stefan; Baklanov, Mikhaïl

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Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

Date

2016

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Zhang, Liping

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de Marneffe, Jean-Francois

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Journal of Physics D: Applied Physics

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1956 since deposited on 2021-10-23

Acq. date: 2026-02-25

Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

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