Publication:

Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

Date

2016
Journal article
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Author(s)

Zhang, Liping  
;
de Marneffe, Jean-Francois  
;
Leroy, Florian
;
Lefaucheux, Philippe
;
Tillocher, Thomas
;
Dussart, Remi
;
Maekawa, Kaoru
;
yatsuda, koichi
;
Dussarrat, Christian
;
Goodyear, Andy
;
Cooke, Mike
;
De Gendt, Stefan  
;
Baklanov, Mikhaïl

Journal

Journal of Physics D: Applied Physics

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1956 since deposited on 2021-10-23
Acq. date: 2026-02-24

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1956 since deposited on 2021-10-23
Acq. date: 2026-02-24

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