Browsing by author "van der marel, C."
Now showing items 1-3 of 3
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Physical properties of thin nitrided Hf silicates and their impact on the performance of advanced transistors having a TaN metal gate electrode
Cubaynes, Florence; van der marel, C.; Hopstaken, M.J.P.; Van Elshocht, Sven; Everaert, Jean-Luc; Schaekers, Marc (2005) -
Plasma nitridation optimization sub-15A gate dielectrics
Cubaynes, Florence; Schmitz, Jurriaan; van der marel, C.; Snijders, H.; Veloso, Anabela; Rothschild, Aude; Olsen, C.; Date, Lucien (2003) -
Plasma-nitrided silicon-rich oxide as an extension to ultrathin nitrided oxide gate dielectrics
Cubaynes, F.N.; Venezia, V.C.; van der marel, C.; Snijders, J.H.M.; Everaert, Jean-Luc; Shi, Xiaoping; Rothschild, Aude; Schaekers, Marc (2005)