Authors

Cubaynes, Florence; van der marel, C.; Hopstaken, M.J.P.; Van Elshocht, Sven; Everaert, Jean-Luc; Schaekers, Marc

Conference

MRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility Semiconductors

Title

Physical properties of thin nitrided Hf silicates and their impact on the performance of advanced transistors having a TaN metal gate electrode

Publication type

Oral presentation